SUBSTRATE TRANSFER METHOD

• Main Authors: IGARASHI HIROSHI, MIYAJIMA TOSHIHIKO, ABE TOMOSHI, EMOTO ATSUSHI, KATO NOZOMI, IWAMOTO TADAMASA
• Format: Patent
• Language: English; Japanese
• Published: 27.04.2015
• Subjects: ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; BASIC ELECTRIC ELEMENTS; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKAGES; PACKAGING ELEMENTS; PACKING; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; STORING; TRANSPORTING

PROBLEM TO BE SOLVED: To suppress the internal pollution of an EFEM part which may occur when a pod is open, in an EFEM system.SOLUTION: In an EFEM system where the cleanliness of an EFEM part, i.e., a micro space, is managed by specific management parameters, a gas subjected to parameter management according to the management parameters of the EFEM part is supplied into the pod in the stage prior to opening the lid of the pod. After the internal atmosphere of the pod is brought into a state not influencing the internal atmosphere of the EFEM part, interior of the pod and the EFEM part are interconnected by removing the lid, before transferring a substrate in the pod. 【課題】ＥＦＥＭシステムにおいて、ポッド開放時に生じ得るＥＦＥＭ部の内部雰囲気の汚染を抑制する。【解決手段】微小空間たるＥＦＥＭ部の清浄度が特定の管理パラメータにより管理されたＥＦＥＭシステムにおいて、ポッドの蓋解放前の段階でポッド内部にＥＦＥＭ部の管理パラメータに準じたパラメータ管理が為された気体を供給し、ポッド内雰囲気がＥＦＥＭ部内部雰囲気に影響を与えない清浄度が得られた状況とした後に。ポッドの蓋を取り外してポッド内部とＥＦＥＭ部とを連通させ、その後ポッド内の基板の搬送を行うこととする。【選択図】図２