DRAWING APPARATUS AND DRAWING METHOD

• Main Authors: MATSUNAGA SHINICHI, TABATA HIDETOSHI
• Format: Patent
• Language: English; Japanese
• Published: 20.04.2015
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CINEMATOGRAPHY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; FREQUENCY-CHANGING; HOLOGRAPHY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; MATERIALS THEREFOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PRINTED CIRCUITS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PROBLEM TO BE SOLVED: To provide a drawing apparatus and a drawing method which increase the resolution of a pattern by focusing pattern light on an inclined drawing area in drawing a pattern in an inclined-shape drawing area of a to-be-drawn object, prevent deformation of the pattern, and improve the resolution of the pattern by causing the pattern light to enter perpendicularly a resist film of the inclined drawing area.SOLUTION: A drawing apparatus irradiates a to-be-drawn object with drawing light by a light modulation element and draws a pattern on the object while scanning the object continuously relative to the drawing light. The drawing apparatus includes: holding means of holding the object; measurement means of measuring an inclination of a to-be-drawn surface of the to-be-drawn object held by the holding means; inclination adjustment means of adjusting the inclination of the holding means; and inclination control means of controlling the inclination adjustment means according to measurements of the measurement means so that the drawing light enters the to-be-drawn surface of the to-be-drawn object nearly perpendicularly. 【課題】被描画体の傾斜形状の描画領域に対してパターンを描画する際に、傾斜描画領域にパターン光の焦点を合わせてパターンの解像度を高め、パターンの変形を防止し、傾斜描画領域のレジスト膜にパターン光を垂直に入射させてパターンの解像度を高めることができる描画装置及び描画方法を得る。【解決手段】光変調素子により描画光を被描画体に照射し、前記被描画体を前記描画光に対して連続的に走査しながら前記被描画体にパターンを描画する描画装置であって、前記被描画体を保持する保持手段と、前記保持手段によって保持された前記被描画体の被描画面の傾きを測定する測定手段と、前記保持手段の傾きを調整する傾き調整手段と、前記測定手段の測定結果に応じて、前記描画光が前記被描画体の被描画面に略垂直に入射するように、前記傾き調整手段を制御する傾き制御手段と、を備えることを特徴とする描画装置。【選択図】図８