INSPECTION TOOL, ELECTRODE PART, PROBE, AND METHOD FOR MANUFACTURING INSPECTION TOOL

• Main Author: NUMATA KIYOSHI
• Format: Patent
• Language: English; Japanese
• Published: 20.04.2015
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a structure inexpensive and stable in electrical connectivity which is an inspection tool for using a four-terminal method on a small inspection point.SOLUTION: The inspection tool includes a plurality of probes 20 and a plurality of electrode parts 30. The probe 20 includes a core-shaped probe 21 and a cylindrical probe 24. The core shaped probe 21 is electrically connected to an inspection point. The cylindrical probe 24 is arranged outside of the core-shaped probe 21 insulated from the core-shaped probe 21, and electrically connected to the inspection point. The electrode part 30 includes an inner cylindrical electrode part 31 and an outer cylindrical electrode part 34. The inner cylindrical electrode 31 is electrically connected to the core-shaped probe 21 by being kept into contact with the outer peripheral surface of the core-shaped probe 21 which is inserted into the inner cylindrical electrode part 31. The outer cylindrical electrode part 34 is arranged outside of the inner cylindrical electrode part 31 insulated from the inner cylindrical electrode part 31, and electrically connected to the cylindrical probe 24. 【課題】小さな検査点に４端子法を用いるための検査用治具であって、低コストかつ電気的接続性が安定した構成を提供する。【解決手段】検査用治具は、複数のプローブ２０と、複数の電極部３０と、を備える。プローブ２０は、芯状プローブ２１と、筒状プローブ２４と、を備える。芯状プローブ２１は、検査点に電気的に接続される。筒状プローブ２４は、芯状プローブ２１の外側に、当該芯状プローブ２１と絶縁された状態で配置され、検査点に電気的に接続される。電極部３０は、内筒電極部３１と、外筒電極部３４と、を備える。内筒電極部３１は、挿入された芯状プローブ２１の外周面と接触することで、当該芯状プローブ２１に電気的に接続される。外筒電極部３４は、内筒電極部３１の外側に、当該内筒電極部３１と絶縁された状態で配置され、筒状プローブ２４と電気的に接続される。【選択図】図６