ELECTRON MICROSCOPE

• Main Authors: OYAGI TOSHIYUKI, YOTSUTSUJI TAKAFUMI
• Format: Patent
• Language: English; Japanese
• Published: 09.04.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide an electron microscope capable of acquiring a microscope image of a sample placed under a gas atmosphere using a detector which requires voltage application.SOLUTION: An electron microscope comprises: a detector which detects an electron generated by irradiating a sample with an electron beam from an electron gun; a display device which displays a microscope image of the sample on the basis of an output from the detector; a device which measures sample movement on the basis of the image; a device which controls gas introduction; a gas introduction device which emits a gas to the sample; and a gas control device which controls an amount of gas emissions by the gas introduction device so that a degree of vacuum in the space in which the detector is installed is continuously kept at less than a setting value during gas emission by the gas introduction device. 【課題】電圧の印加が必要な検出器を利用してガス雰囲気におかれた試料の顕微鏡像が得られる電子顕微鏡を提供すること。【解決手段】電子銃からの電子線が試料に照射されることで発生する電子を検出する検出器と、当該検出器の出力に基づいて前記試料の顕微鏡像を表示する表示装置と、画像より試料移動を計測する装置と、ガス導入を制御する装置と、前記試料にガスを放出するためのガス導入装置と、当該ガス導入装置によるガス放出中に、前記検出器が設置された空間内の真空度が継続的に設定値未満に保持されるように前記ガス導入装置によるガス放出量を制御するガス制御装置を備えるものとする。【選択図】図２