MANUFACTURING METHOD OF OPTICAL WAVEGUIDE, OPTICAL WAVEGUIDE, AND REFLECTION SURFACE FORMING METHOD

• Main Authors: KUBOTA TAKUMI, CHOKI KOJI
• Format: Patent
• Language: English; Japanese
• Published: 30.03.2015
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical waveguide, the optical waveguide, and a reflection surface forming method that can form a plurality of reflection surfaces at a time and increase the forming accuracy of the reflection surfaces.SOLUTION: The manufacturing method of an optical waveguide of the present invention includes an arrangement process and a forming process. In the arrangement process, a movable mask 300 including a plurality of openings 310 that are arranged in parallel along the X direction and have a part whose length in the X direction varies continuously along the Y direction is disposed on one surface side of an optical waveguide 1A including a plurality of core parts 14 arranged in parallel at an interval in the X direction. In the forming process, laser beams LL are radiated to the optical waveguide 1A via the openings 310 in the movable mask 300, and the movable mask 300 is moved in the X direction, thereby forming a plurality of notches 70 having a mirror 7 in the optical waveguide 1A correspondingly to the core parts 14. 【課題】一度に複数の反射面を形成することができ、かつ、反射面の形成精度の高い光導波路の製造方法、光導波路および反射面形成方法を提供すること。【解決手段】本発明の光導波路の製造方法は、Ｘ方向に間隔を隔てて並設された複数のコア部１４を備える光導波路１Ａの一方の面側に、Ｘ方向に沿って並設され、Ｘ方向の長さがＹ方向に沿って連続的に変化する部分を備えた複数の開口３１０を有する可動マスク３００を配置する配置工程と、可動マスク３００の開口３１０を介して光導波路１ＡにレーザーＬＬを照射するとともに、可動マスク３００をＸ方向に移動させることにより、光導波路１Ａにミラー７を有する複数の切り欠き部７０をコア部１４に対応して形成する形成工程と、を有している。【選択図】図３