PIEZOELECTRIC ELEMENT, LIQUID INJECTION HEAD, AND LIQUID INJECTION APPARATUS

• Main Authors: HARA HISAKI, KATO JIRO, MOROZUMI KOICHI, DENDA SATOSHI
• Format: Patent
• Language: English; Japanese
• Published: 19.03.2015
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide a piezoelectric element in which crystal near a piezoelectric layer and interfaces of electrodes holding the piezoelectric layer has good quality and which has excellent piezoelectric properties.SOLUTION: A piezoelectric element 100 comprises: a first conductive layer 10; a second conductive layer 20 arranged opposite to the first conductive layer 10; and a piezoelectric layer 30 disposed between the first conductive layer 10 and the second conductive layer 20 and formed of composite oxide containing at least lead, zirconium, titanium, and oxygen. The piezoelectric layer 30 has a lead concentration gradient region 32 where concentration of lead increases from a side of the first conductive layer 10 to a side of the second conductive layer 20, and the lead concentration gradient region 32 is disposed on an end of the piezoelectric layer 30 on the side of the first conductive layer 10. 【課題】圧電体層およびこれを挟む電極の界面付近における結晶が良質で、圧電特性の良好な圧電素子を提供すること。【解決手段】本発明にかかる圧電素子１００は、第１導電層１０と、第１導電層１０に対向して配置された第２導電層２０と、第１導電層１０および第２導電層２０の間に配置され、少なくとも鉛、ジルコニウム、チタンおよび酸素を含む複合酸化物によって形成された圧電体層３０と、を含み、圧電体層３０は、鉛の濃度が第１導電層１０側から第２導電層２０側に向かって増加する鉛濃度勾配領域３２を有し、鉛濃度勾配領域３２は、圧電体層３０の第１導電層１０側の端に配置された。【選択図】図１