LASER APPARATUS

• Main Authors: FUJIKAWA SHUICHI, UEMATSU MASAYUKI, NISHIMAE JUNICHI, YAMAMOTO TATSUYA, YANO YOICHI
• Format: Patent
• Language: English; Japanese
• Published: 16.03.2015
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

PROBLEM TO BE SOLVED: To provide a laser apparatus capable of stably obtaining pulse laser light having controllability combined with high output, and high quality even when an optical axis position of an optical resonator is displaced to an electrode in a gas flow direction.SOLUTION: When a discharge area formed between a pair of electrodes is divided into a first discharge area, a second discharge area and a third discharge area, respectively, from the upstream side in a gas flow direction of laser gas, the discharge power density averaged in an optical axis direction of a laser beam in the second discharge area is smaller than that averaged in the optical axis direction of the laser beam in the first discharge area, and an optical axis of an optical resonator is provided so as to pass through the second discharge area. 【課題】光共振器の光軸位置が電極に対してガス流方向にずれた場合でも、高出力で制御性がよく、高品質なパルスレーザ光を安定して得ることができるレーザ装置を得る。【解決手段】一対の電極間に形成される放電領域を、レーザガスのガス流方向の上流側からそれぞれ第１放電領域、第２放電領域および第３放電領域に分割した場合に、第２放電領域において、レーザ光の光軸方向に平均化された放電電力密度が、第１放電領域において、レーザ光の光軸方向に平均化された放電電力密度よりも小さく、光共振器の光軸が、第２放電領域を通るように設けられている。【選択図】図６