PHOTOSENSITIVE RESIN MATERIAL AND RESIN FILM

• Main Author: TANAKA YUMA
• Format: Patent
• Language: English; Japanese
• Published: 16.03.2015
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; THEIR PREPARATION OR CHEMICAL WORKING-UP

PROBLEM TO BE SOLVED: To provide a resin film made from a photosensitive resin material, achieving an excellent processability while maintaining the performance as a permanent film.SOLUTION: A photosensitive resin material for use in forming a permanent film has an iron content of 0.005 ppm or more and 80 ppm or less relative to the total nonvolatile components, in measurement by frameless atomic absorption analysis. 【課題】感光性樹脂材料を用いて形成される樹脂膜について、永久膜としての性能を維持しつつ、優れた加工性を実現する。【解決手段】感光性樹脂材料は、永久膜を形成するために用いられる感光性樹脂材料であって、フレームレス原子吸光分析により測定される、不揮発成分全体に対する鉄の含有量が０．００５ｐｐｍ以上８０ｐｐｍ以下である。【選択図】図１