INTER-MOTION MEMBER STRUCTURE AND WORK-PIECE TRANSPORT DEVICE HAVING THIS STRUCTURE

PROBLEM TO BE SOLVED: To provide an inter-motion member structure that is suitable for recovering lubricant evaporated under vacuum environment.SOLUTION: An inter-motion member structure B1 of this invention comprises a first member 4; a second member 5 that can be moved relatively in respect to the...

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Bibliographic Details
Main Author MIYAMOTO REI
Format Patent
LanguageEnglish
Japanese
Published 16.02.2015
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Summary:PROBLEM TO BE SOLVED: To provide an inter-motion member structure that is suitable for recovering lubricant evaporated under vacuum environment.SOLUTION: An inter-motion member structure B1 of this invention comprises a first member 4; a second member 5 that can be moved relatively in respect to the first member 4; a relative motion mechanism 6 installed between the first member 4 and the second member 5 so as to perform a relative motion of the second member 5 in respect to the first member 4 in a prescribed direction under presence of lubricant 64; seal means 7 arranged at either one of the first member 4 or the second member 5 so as to form a closed space S among the first member 4, the second member 5 and the relative motion mechanism 6; and cooling means 8 arranged in at least one of the first member 4 and the second member 5 so as to cool the lubricant 64 vaporized within the closed space S. With such a configuration as above, it is possible to prevent vaporized lubricant from dispersing into external part and at the same time to elongate a life of the relative motion mechanism by returning vaporized lubricant to the relative motion mechanism. 【課題】真空環境下において気化した潤滑剤を回収するのに適した相対動部材間の構造を提供する。【解決手段】相対部材間の構造B1は、第1部材4と、第1部材4に対して相対動可能な第2部材5と、第1および第2部材4.5の間に介装され、潤滑剤64の存在下で第2部材5を第1部材4に対して所定方向に相対動させるための相対動機構6と、第1部材4または第2部材5のいずれか一方に設けられ、第1部材4、第2部材5および相対動機構6との間で閉じた空間Sを形成するためのシール手段7と、第1部材4および第2部材5のうち少なくとも一方に設けられ、閉じた空間Sの内部において気化した潤滑剤64を冷却するための冷却手段8とを備える。このような構成によれば、気化した潤滑剤の外部への拡散を防止するとともに、気化した潤滑剤を相対動機構に戻すことにより当該相対動機構の長寿命化を図ることができる。【選択図】図3
Bibliography:Application Number: JP20130159279