INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, ELECTRONIC EQUIPMENT, METHOD FOR MANUFACTURING INTERFERENCE FILTER, AND MEMS ELEMENT

PROBLEM TO BE SOLVED: To provide an interference filter capable of suppressing warpage of a substrate, an optical filter device, an optical module, electronic equipment, a method for manufacturing an interference filter, and a MEMS (micro-electro mechanical system) element.SOLUTION: A wavelength var...

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Bibliographic Details
Main Authors NISHIMURA AKIYUKI, SAKASHITA YUKI
Format Patent
LanguageEnglish
Japanese
Published 05.02.2015
Subjects
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
RADIATION PYROMETRY
TESTING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide an interference filter capable of suppressing warpage of a substrate, an optical filter device, an optical module, electronic equipment, a method for manufacturing an interference filter, and a MEMS (micro-electro mechanical system) element.SOLUTION: A wavelength variable interference filter 5 includes: a fixed substrate 51; a movable substrate 52 opposing to the fixed substrate 51; a pair of reflection films 54, 55; a fixed lead-out electrode 561A disposed on the fixed substrate 51; and a movable connection electrode 562B disposed on the movable substrate 52 and in contact with the fixed lead-out electrode 561A at a connection position. The movable substrate 52 has, in a plan view in a substrate thickness direction of the fixed substrate 51 and the movable substrate 52, a first groove 520 disposed at the connection position and a second groove 522 having an area larger than that of the first groove 520 in the plan view and connected to the first groove 520. 【課題】基板の撓みを抑制可能な干渉フィルター、光学フィルターデバイス、光学モジュール、電子機器、干渉フィルターの製造方法、及びＭＥＭＳ素子を提供する。【解決手段】波長可変干渉フィルター５は、固定基板５１と、固定基板５１に対向する可動基板５２と、一対の反射膜５４，５５と、固定基板５１に設けられた固定引出電極５６１Ａと、可動基板５２に設けられ、接続位置において固定引出電極５６１Ａに当接する可動接続電極５６２Ｂと、を備え、可動基板５２は、固定基板５１及び可動基板５２を基板厚み方向から見た平面視において、接続位置に設けられた第一溝部５２０と、上記平面視において、第一溝部５２０よりも面積が大きく、かつ第一溝部５２０に連結された第二溝部５２２とを有する。【選択図】図２
Bibliography:Application Number: JP20130156420