PLASMON RESONANCE STRUCTURE

• Main Author: OTA YOSHIMI
• Format: Patent
• Language: English; Japanese
• Published: 05.02.2015
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MEASURING; NANOTECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TESTING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a plasmon resonance structure capable of obtaining locally high electric field enhancement.SOLUTION: A plasmon resonance structure 1 has an uneven structure part 20 including a plurality of projections 21 periodically formed in a plane view and a plurality of depressions 22 formed between the plurality of projections. The projection is approximately a trapezoidal shape having an upper base 21T smaller than a lower base 21B in a cross sectional view. When a periodic interval between the plurality of projections is set to P [nm], the width of the lower base of the projection in a cross sectional view is set to W [nm], and an inclination angle between the lower base of the projection and a side 21S is set to [°], P is 10-1000 nm; is 70°or more and less than 90°; a parameter A represented by a following formula (1) is 0.035 or less; and a parameter B represented by a following formula (2) is 20 nm or less. 【課題】局所的に高い電場増強を得ることが可能なプラズモン共鳴構造体を提供する。【解決手段】プラズモン共鳴構造体１は、平面視周期的に形成された複数の凸部２１と複数の凸部の間に形成された複数の凹部２２とを含む凹凸構造部２０を有する。凸部は断面視で上底２１Ｔが下底２１Ｂよりも小さい略台形状であり、複数の凸部の周期間隔をＰ［ｎｍ］とし、断面視において、凸部の下底の幅をＷ［ｎｍ］とし、凸部の下底に対する側面２１Ｓの傾斜角度を ［?］としたとき、Ｐが１０〜１０００ｎｍであり、 が７０?以上９０?未満であり、下記式（１）で表されるパラメータＡが０．０３５以下であり、下記式（２）で表されるパラメータＢが２０ｎｍ以下である。【選択図】図１