PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS
PROBLEM TO BE SOLVED: To provide a highly reliable piezoelectric element.SOLUTION: A piezoelectric element 100 includes: a first electrode 10; a piezoelectric layer 20 formed above the first electrode 10 while having a longitudinal direction and a transverse direction; and a second electrode 30 form...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
05.02.2015
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a highly reliable piezoelectric element.SOLUTION: A piezoelectric element 100 includes: a first electrode 10; a piezoelectric layer 20 formed above the first electrode 10 while having a longitudinal direction and a transverse direction; and a second electrode 30 formed above the piezoelectric layer 20, where at least a part of a side surface 22 of the piezoelectric layer 20 in the transverse direction is an uneven surface 23, and width Wy of the piezoelectric layer 20 in the transverse direction from the second electrode 30 to the first electrode 10 changes according to the uneven surface 23.
【課題】信頼性の高い圧電素子を提供する。【解決手段】本発明に係る圧電素子100は、第1電極10と、第1電極10の上方に、長手方向と短手方向とを有して形成された圧電体層20と、圧電体層20の上方に形成された第2電極30と、を含み、圧電体層20の前記短手方向の側面22の少なくとも一部は、凹凸面23であり、第2電極30から第1電極10に向かうに従って、圧電体層20の前記短手方向の幅Wyは、凹凸面23によって変化する。【選択図】図1 |
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Bibliography: | Application Number: JP20140225949 |