ENVIRONMENT MEASURING APPARATUS AND ENVIRONMENT SENSOR

• Main Authors: SOEDA SUSUMU, KAMAKURA NOBUHITO, CHIN TOEN
• Format: Patent
• Language: English; Japanese
• Published: 02.02.2015
• Subjects: INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide an environment measuring apparatus and an environment sensor capable of reducing power consumption.SOLUTION: An environment measuring apparatus 100 includes: a temperature sensor for detecting the temperature of a gas in an environment; a first substrate 30 which has a cavity 35 formed on its upper surface; a thin film 31 that is provided on the upper surface of the first substrate 30 and contains heater elements 32 capable of heating the gas; and a temperature control circuit for controlling temperature of the heater elements 32 so that difference from the temperature of the gas becomes a predetermined value. The heater elements 32 are disposed at the upper part of the cavity 35 in the thin film 31. 【課題】消費電力量を低減させることのできる環境測定装置および環境センサを提供する。【解決手段】本発明の環境測定装置１００は、環境における気体の温度を検出する温度センサと、上面にキャビティ３５が形成される第１基板３０と、第１基板３０の上面の面上に設けられ、前述の気体を加熱可能な発熱素子３２を含む薄膜３１と、前述の気体の温度との温度差が所定値となるように、発熱素子３２の温度を制御する温度制御回路と、を備え、発熱素子３２は、薄膜３１におけるキャビティ３５の上の部分に配置される。【選択図】図４