PIEZOELECTRIC ELEMENT, LIQUID INJECTION HEAD, AND LIQUID INJECTION APPARATUS

• Main Authors: MOROZUMI KOICHI, ASAOKA ICHIRO, KIMURA KIYOKA, KURIKI AKIRA
• Format: Patent
• Language: English; Japanese
• Published: 29.01.2015
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide a piezoelectric element which is excellent in piezoelectric characteristics and durability by enhancing crystallinity of a piezoelectric layer in the vicinity of a lower electrode, and to provide a liquid injection head and a liquid injection apparatus.SOLUTION: A liquid injection head I includes a piezoelectric element 300 including: a first electrode 60; a piezoelectric layer 70 provided on the first electrode 60 via an orientation control layer 72; and a second electrode 80 provided on the piezoelectric layer 70. The piezoelectric layer 70 comprises a composite oxide of a perovskite structure in which an A site contains lead and a B site contains zirconium and titanium. The orientation control layer 72 comprises a composite oxide of a perovskite structure in which an A site contains lanthanum and a B site contains nickel and titanium. 【課題】下部電極近傍の圧電体層の結晶性を高め、圧電特性及び耐久性に優れた圧電素子、液体噴射ヘッド及び液体噴射装置を提供する。【解決手段】第１電極６０と、第１電極上に配向制御層７２を介して設けられた圧電体層７０と、圧電体層上に設けられた第２電極８０と、を具備する圧電素子３００を備えた液体噴射ヘッドＩであって、圧電体層７０は、Ａサイトに鉛を含み、Ｂサイトにジルコニウム及びチタンを含むペロブスカイト構造の複合酸化物からなり、配向制御層７２は、Ａサイトにランタンを含み、Ｂサイトにニッケル及びチタンを含むペロブスカイト構造の複合酸化物からなる。【選択図】図３