SAMPLE HOLDER, AND CHARGED PARTICLE APPARATUS

• Main Authors: YAHATA KIYOSHI, KIKUCHI HIDEKI, MARUYAMA NAOTOMO
• Format: Patent
• Language: English; Japanese
• Published: 29.01.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide a sample holder tiltable around a rotary shaft of a sample support and capable of reducing a blocking amount of characteristic X-ray generated from a sample, in which thickness in the electron beam direction of a structure around the sample support is reduced since it is necessary that a spacing between pole pieces is required for high resolution, the reduction in spacing tending to block the characteristic X-ray, and yet the characteristic X-ray generated from the sample is not blocked until reaching a detector in order to enhance the detection accuracy, in the energy dispersive X-ray spectrometry.SOLUTION: A sample holder includes: a sample support having one rotary shaft and for holding a sample; and a frame body for supporting the sample support. The sample support is supported in the frame body by the one rotary shaft, and a cutout is formed to the frame body on the side opposite to the one rotary shaft with respect to the sample support. 【課題】電子顕微鏡観察において、ポールピース間のギャップを小さくするために、試料台周りの構造の電子線方向の厚さを小さくし、加えて、エネルギー分散型Ｘ線分析での検出精度を上げるため、試料から発生する特性Ｘ線を検出器まで遮らないようにする必要がある。当該課題に鑑み、本発明は試料台の回転軸周りに傾斜が可能で、試料から発生する特性Ｘ線を遮る量を低減した試料ホールダを提供する。【課題を解決するための手段】回転軸を有する試料を保持する試料台と、前記試料台を支持する枠体を有する試料ホールダであって、前記試料台は１つの回転軸で枠体に支持されており、前記１つの回転軸の前記試料台に対する反対側の枠体部分に欠損部を設けることを特徴とする試料ホールダ。【選択図】 図４