DYNAMIC QUANTITY MEASURING DEVICE

• Main Authors: ASHIDA YOSHIAKI, SOMA ATSURO
• Format: Patent
• Language: English; Japanese
• Published: 29.01.2015
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a dynamic quantity measuring device in which a strain measurement range on a compression side is expanded.SOLUTION: A dynamic quantity measuring device includes: a sensor chip that has a plurality of piezoresistive elements and electrode pads formed on a surface of a semiconductor substrate; a lead wiring part that includes wiring electrically connected with the electrode pads; and a metal plate that is bonded to a rear surface of the sensor chip. A rear surface of the metal plate has a protrusion in a part within a region opposed to the rear surface of the sensor chip. 【課題】本発明の目的は、圧縮側のひずみ計測範囲を拡大した力学量測定装置を提供することにある。【解決手段】力学量測定装置は、半導体基板の表面に複数のピエゾ抵抗素子および電極パッドが形成されたセンサチップと、前記電極パッドと電気的に接続される配線を備える引出配線部と、前記センサチップの裏面と接合される金属板と、を有し、前記金属板の裏面には、前記センサチップの裏面と対向する領域内の一部に突起部を有することを特徴とする。【選択図】図５