CLEAN ROOM AND FAN FILTER UNIT

PROBLEM TO BE SOLVED: To solve the problem that regarding a fan filter unit of a clean room, since a conventional fan filter unit has only one suction port at a side or upper place, an air residence area occurs and air in the residence area is circulated.SOLUTION: In a fan filter unit 1 in a roofles...

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Main Authors MURAE YUKITADA, ITO SHIGEHISA, KUBO NATSUKI, OTA YUJI, NAGAI HIROYUKI, KURIKI SHIGERU, SUZUKI TAKAHIKO, AONO MASAKI, NAGANO KOJI
Format Patent
LanguageEnglish
Japanese
Published 19.01.2015
Subjects
AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
RANGES
VENTILATING
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To solve the problem that regarding a fan filter unit of a clean room, since a conventional fan filter unit has only one suction port at a side or upper place, an air residence area occurs and air in the residence area is circulated.SOLUTION: In a fan filter unit 1 in a roofless clean room in which a ceiling for a clean room is eliminated, a suction port in a horizontal direction is provided with a main suction port 2a, and auxiliary suction ports 2b-2d for eliminating an air residence area. 【課題】本発明は、クリーンルームのファンフィルタユニットに関し、従来のファンフィルタユニットにおいては吸込み口が横または上の一箇所であって、空気の滞留域が発生したり、滞留域の空気が循環したりすることが課題であって、それを解決することである。【解決手段】クリーンルーム用の天井を無くした天井レスクリーンルームにおけるファンフィルタユニットにおいて、水平方向の吸込み口は、メインの吸込み口２ａと、それ以外に空気の滞留域を無くすための補助的吸込み口（２ｂ〜２ｄ）とが設けられてなるクリーンルームのファンフィルタユニット１とするものである。【選択図】 図１
Bibliography:Application Number: JP20130138854