WORKPIECE AND MANUFACTURING METHOD THEREOF

• Main Author: ZHANG CHUN-JIE
• Format: Patent
• Language: English; Japanese
• Published: 19.01.2015
• Subjects: APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLEANING; CLEANING IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GLASS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; JOINING GLASS TO GLASS OR OTHER MATERIALS; METALLURGY; MINERAL OR SLAG WOOL; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SPRAYING OR ATOMISING IN GENERAL; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a workpiece with high hardness and an excellent hydrophobic property, and a method for manufacturing the workpiece.SOLUTION: A workpiece 10 includes a substrate 11, and a diamond-like carbon film 15 that is formed on the substrate 11, and on which plural nano-sized bumps are formed. A workpiece manufacturing method includes steps of: providing the substrate 11; forming a metallic layer 13 on the surface of the substrate 11 by a vacuum deposition method; forming the plural nano-sized bumps on a surface of the metallic layer 13 by cooling the metallic layer 13; and forming the diamond-like carbon film 15, on which the plural nano-sized bumps are distributed, on an upper face of the metallic layer 13 that is subjected to a liquid nitrogen cooling treatment by the vacuum deposition method. 【課題】高硬度及び優れた疎水性を有するワーク及び当該ワークの製造方法を提供する。【解決手段】基材１１及び基材１１の表面に複数のナノレベルの突起が形成されるダイヤモンドライクカーボン膜１５を備えたワーク１０であって、基材１１を提供する工程と、真空蒸着法によって基材１１の表面に金属層１３を形成する工程と、液体窒素を用いて金属層１３を冷却することによって金属層１１の表面に複数のナノレベルの突起が形成される工程と、真空蒸着法によって、液体窒素冷却処理を経た金属層１１の上面に複数のナノレベルの突起が分布されるダイヤモンドライクカーボン膜１５を形成する工程とを備えるワークの製造方法。【選択図】図１