CONVEYING DEVICE, CONVEYING METHOD, EXPOSING DEVICE, AND DEVICE MANUFACTURING METHOD

• Main Authors: USHIJIMA YASUYUKI, HANAZAKI TETSUTSUGU, KANESHIRO ASAKO
• Format: Patent
• Language: English; Japanese
• Published: 15.01.2015
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To deliver and receive a substrate without generating placement shift or deformation.SOLUTION: A conveying device includes: a first support part which supplies gas to one surface of a substrate and is capable of supporting floating of the substrate via gas; a second support part capable of supporting one surface of the substrate; a drive part which moves at least one of the first and second support parts and brings the first and second support parts close to or into contact with each other to be arranged in a first direction; and a transfer part which moves the substrate supported by one of the first and second support parts arranged by the drive part to the other side in the first direction. 【課題】載置ずれや変形を生じさせることなく基板の受け渡しを行う。【解決手段】 搬送装置は、基板の一面に対して気体を供給し、気体を介して基板を浮上支持可能な第１支持部と、基板の一面を支持可能な第２支持部と、第１及び第２支持部の少なくとも１つを移動し、第１及び第２支持部を互いに近接又は接触させて第１方向に配列する駆動部と、駆動部によって配列された第１及び第２支持部の一方が支持する基板を、第１方向に沿って他方側に移動する移送部と、を備える。【選択図】図２３