THREE-DIMENSIONAL MAPPING USING SCANNING ELECTRON MICROSCOPE IMAGES
PROBLEM TO BE SOLVED: To provide a method and a system for calculating a three-dimensional topographical model of a sample surface from plural SEM images of a sample captured by plural detectors for preventing distortion of a three-dimensional model when the sample surface is made up of multiple typ...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
15.01.2015
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Subjects | |
Online Access | Get full text |
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