THREE-DIMENSIONAL MAPPING USING SCANNING ELECTRON MICROSCOPE IMAGES

• Main Authors: YAKOV WEINBERG, SCHWARZBAND ISHAI
• Format: Patent
• Language: English; Japanese
• Published: 15.01.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide a method and a system for calculating a three-dimensional topographical model of a sample surface from plural SEM images of a sample captured by plural detectors for preventing distortion of a three-dimensional model when the sample surface is made up of multiple typ...