HIGH REFLECTIVE MIRROR AND FABRY-PEROT FILTER HAVING THE HIGH REFLECTIVE MIRROR

• Main Authors: YAMASHITA SHUICHI, TANEMURA TOMOKI, WADO HIROYUKI
• Format: Patent
• Language: English; Japanese
• Published: 15.01.2015
• Subjects: COLORIMETRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; RADIATION PYROMETRY; TESTING

PROBLEM TO BE SOLVED: To reduce noise by incident light passing through an etching hole in a high reflective mirror in which an optical multilayer film mirror is formed.SOLUTION: The high reflective mirror includes an optical multilayer film mirror formed in at least a part of the mirror. The optical multilayer film mirror includes: a first high refractive index film and a second high refractive index film having a first refractive index; and a first low refractive index layer having a second refractive index smaller than the first refractive index. The first high refractive index film and the second high refractive index film are disposed opposing to each other via the first low refractive index layer; and the first high refractive index film has a first through-hole that penetrates the first high refractive index film and communicates an outside space with the first low refractive index layer. A first light-shielding zone is formed on one surface side of the second high refractive index film opposite to the first high refractive index film; and the first light-shielding zone is selectively formed in such a manner that, in a part where the optical multilayer film mirror is formed, neither incident light in a direction along the stacked direction of the first and second high refractive index films and the first low refractive index layer, nor diffracted light of the incident light pass through the first through-hole. 【課題】光学多層膜ミラーが形成された高反射ミラーにおいて、エッチングホールを通過する入射光によるノイズを低減する。【解決手段】この高反射ミラーは、少なくとも一部に光学多層膜ミラーが形成され、光学多層膜ミラーは、第１屈折率を有する第１高屈折率膜および第２高屈折率膜と、第１折率よりも小さい第２屈折率を有する第１低屈折率層と、を有する。また、第１高屈折率膜と前記第２高屈折率膜が、前記第１低屈折率層を介して互いに対向して配置され、第１高屈折率膜が、第１高屈折率膜を貫通して外部空間と第１低屈折率層とを連通する第１貫通孔を有する。そして、第２高屈折率膜における第１高屈折率膜と反対の一面側に第１遮光帯が形成され、第１遮光帯は、光学多層膜ミラーが形成された部分において、第１および第２高屈折率膜、第１低屈折率層の積層方向からの入射光およびその回折光が、第１貫通孔を通過しないように選択的に形成される。【選択図】図１