DRIVE STAGE, AND COMPONENT MOUNTING DEVICE USING THE SAME
PROBLEM TO BE SOLVED: To provide a drive stage capable of achieving life extension of a linear motor system.SOLUTION: A drive stage 10 comprises: a supporting body 200; and a beam 104 movably supported to the supporting body 200 in a Y-axis direction via a linear motor system 103 and a supporting pl...
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Format | Patent |
Language | English Japanese |
Published |
05.01.2015
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Abstract | PROBLEM TO BE SOLVED: To provide a drive stage capable of achieving life extension of a linear motor system.SOLUTION: A drive stage 10 comprises: a supporting body 200; and a beam 104 movably supported to the supporting body 200 in a Y-axis direction via a linear motor system 103 and a supporting plate 108. The linear motor system 103 has: a plurality of linear rails 110a and 110a fixed to the supporting body 200; and a linear motor 130 fixed to the supporting plate 108 moving on the linear rails 110a and 110a. A linear expansion coefficient of a material of the supporting body 200 is larger than that of a material of the supporting plate 108.
【課題】リニアモータシステムの長寿命化を実現可能な駆動ステージを提供する。【解決手段】駆動ステージ10は、支持体200と、該支持体200に対してリニアモータシステム103と支持プレート108とを介在してY軸方向に移動可能に支持されたビーム104と、を備える。リニアモータシステム103は、支持体200に固定された複数のリニアレール110a,110aと、リニアレール110a,110a上を移動する支持プレート108に固定されたリニアモータ130と、を有する。支持体200の材料の線膨張係数は、支持プレート108の材料の線膨張係数より大きい。【選択図】図1 |
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AbstractList | PROBLEM TO BE SOLVED: To provide a drive stage capable of achieving life extension of a linear motor system.SOLUTION: A drive stage 10 comprises: a supporting body 200; and a beam 104 movably supported to the supporting body 200 in a Y-axis direction via a linear motor system 103 and a supporting plate 108. The linear motor system 103 has: a plurality of linear rails 110a and 110a fixed to the supporting body 200; and a linear motor 130 fixed to the supporting plate 108 moving on the linear rails 110a and 110a. A linear expansion coefficient of a material of the supporting body 200 is larger than that of a material of the supporting plate 108.
【課題】リニアモータシステムの長寿命化を実現可能な駆動ステージを提供する。【解決手段】駆動ステージ10は、支持体200と、該支持体200に対してリニアモータシステム103と支持プレート108とを介在してY軸方向に移動可能に支持されたビーム104と、を備える。リニアモータシステム103は、支持体200に固定された複数のリニアレール110a,110aと、リニアレール110a,110a上を移動する支持プレート108に固定されたリニアモータ130と、を有する。支持体200の材料の線膨張係数は、支持プレート108の材料の線膨張係数より大きい。【選択図】図1 |
Author | NAGAO RIICHI OKAMOTO YOSHINORI YAMAGUCHI MASAKI |
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DocumentTitleAlternate | 駆動ステージ及び駆動ステージを用いた部品実装装置 |
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Snippet | PROBLEM TO BE SOLVED: To provide a drive stage capable of achieving life extension of a linear motor system.SOLUTION: A drive stage 10 comprises: a supporting... |
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SubjectTerms | CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS |
Title | DRIVE STAGE, AND COMPONENT MOUNTING DEVICE USING THE SAME |
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