DRIVE STAGE, AND COMPONENT MOUNTING DEVICE USING THE SAME

PROBLEM TO BE SOLVED: To provide a drive stage capable of achieving life extension of a linear motor system.SOLUTION: A drive stage 10 comprises: a supporting body 200; and a beam 104 movably supported to the supporting body 200 in a Y-axis direction via a linear motor system 103 and a supporting pl...

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Bibliographic Details
Main Authors YAMAGUCHI MASAKI, OKAMOTO YOSHINORI, NAGAO RIICHI
Format Patent
LanguageEnglish
Japanese
Published 05.01.2015
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Summary:PROBLEM TO BE SOLVED: To provide a drive stage capable of achieving life extension of a linear motor system.SOLUTION: A drive stage 10 comprises: a supporting body 200; and a beam 104 movably supported to the supporting body 200 in a Y-axis direction via a linear motor system 103 and a supporting plate 108. The linear motor system 103 has: a plurality of linear rails 110a and 110a fixed to the supporting body 200; and a linear motor 130 fixed to the supporting plate 108 moving on the linear rails 110a and 110a. A linear expansion coefficient of a material of the supporting body 200 is larger than that of a material of the supporting plate 108. 【課題】リニアモータシステムの長寿命化を実現可能な駆動ステージを提供する。【解決手段】駆動ステージ10は、支持体200と、該支持体200に対してリニアモータシステム103と支持プレート108とを介在してY軸方向に移動可能に支持されたビーム104と、を備える。リニアモータシステム103は、支持体200に固定された複数のリニアレール110a,110aと、リニアレール110a,110a上を移動する支持プレート108に固定されたリニアモータ130と、を有する。支持体200の材料の線膨張係数は、支持プレート108の材料の線膨張係数より大きい。【選択図】図1
Bibliography:Application Number: JP20130125904