DRIVE STAGE, AND COMPONENT MOUNTING DEVICE USING THE SAME

PROBLEM TO BE SOLVED: To provide a drive stage capable of achieving life extension of a linear motor system.SOLUTION: A drive stage 10 comprises: a supporting body 200; and a beam 104 movably supported to the supporting body 200 in a Y-axis direction via a linear motor system 103 and a supporting pl...

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Bibliographic Details
Main Authors YAMAGUCHI MASAKI, OKAMOTO YOSHINORI, NAGAO RIICHI
Format Patent
LanguageEnglish
Japanese
Published 05.01.2015
Subjects
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
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Summary:PROBLEM TO BE SOLVED: To provide a drive stage capable of achieving life extension of a linear motor system.SOLUTION: A drive stage 10 comprises: a supporting body 200; and a beam 104 movably supported to the supporting body 200 in a Y-axis direction via a linear motor system 103 and a supporting plate 108. The linear motor system 103 has: a plurality of linear rails 110a and 110a fixed to the supporting body 200; and a linear motor 130 fixed to the supporting plate 108 moving on the linear rails 110a and 110a. A linear expansion coefficient of a material of the supporting body 200 is larger than that of a material of the supporting plate 108. 【課題】リニアモータシステムの長寿命化を実現可能な駆動ステージを提供する。【解決手段】駆動ステージ１０は、支持体２００と、該支持体２００に対してリニアモータシステム１０３と支持プレート１０８とを介在してＹ軸方向に移動可能に支持されたビーム１０４と、を備える。リニアモータシステム１０３は、支持体２００に固定された複数のリニアレール１１０ａ，１１０ａと、リニアレール１１０ａ，１１０ａ上を移動する支持プレート１０８に固定されたリニアモータ１３０と、を有する。支持体２００の材料の線膨張係数は、支持プレート１０８の材料の線膨張係数より大きい。【選択図】図１
Bibliography:Application Number: JP20130125904