SULFONIUM SALT AND OPTICAL ACID GENERATOR
PROBLEM TO BE SOLVED: To provide a sulfonium salt exhibiting high solubilities with organic solvents and high decomposition efficiencies in relation to lights of deep-UV (254 nm) wavelengths or shorter, in particular, and a novel optical acid generator including the sulfonium salt.SOLUTION: The prov...
Saved in:
Main Authors | , , , , , , , |
---|---|
Format | Patent |
Language | English Japanese |
Published |
15.12.2014
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | PROBLEM TO BE SOLVED: To provide a sulfonium salt exhibiting high solubilities with organic solvents and high decomposition efficiencies in relation to lights of deep-UV (254 nm) wavelengths or shorter, in particular, and a novel optical acid generator including the sulfonium salt.SOLUTION: The provided sulfonium salt is expressed by the formula (1); an optical acid generator including the sulfonium salt is also provided [in the formula, Rexpresses an electron-attracting group; Rand Rexpress alkyl groups having 1-5 carbon atoms; p and q are independently integers of 0 to 5; Xexpresses a monovalent counter anion].
【課題】有機溶剤に対する溶解性が高く、特に、deep−UV(254nm)以下の波長の光に対して高い分解効率を有するスルホニウム塩及び該スルホニウム塩を含んでなる新たな光酸発生剤の提供。【解決手段】式(1)で示されるスルホニウム塩及び該スルホニウム塩を含有する光酸発生剤。〔式中、R1は電子吸引性基を表し;R2およびR3は炭素数1〜5のアルキル基などを表し;p、qはそれぞれ独立に0〜5の整数であり;X−は一価の対アニオンを表す。〕【選択図】なし |
---|---|
Bibliography: | Application Number: JP20130114827 |