FILTER

• Main Authors: UMEZAWA HIROYUKI, TACHIKI ETSUJI
• Format: Patent
• Language: English; Japanese
• Published: 15.12.2014
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMISTRY; CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATERTREATMENT OR WASTE MANAGEMENT; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; POLISHING; SEMICONDUCTOR DEVICES; SEPARATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE; TRANSPORTING; TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE

PROBLEM TO BE SOLVED: To provide a filter that can treat large flux of treatment water containing removal objects such as silicon scraps and dehydrate the treatment water at a high level.SOLUTION: In a filter 10, a filter membrane 16 made of a rigid material such as ceramic is submerged in treatment water 34 stored in a treatment tank 14. A predetermined suction pressure is applied to the internal space of the filter membrane 16 by a pump 24 to stack a sedimentary layer 32 composed of removal objects on a filter surface 16A of the filter membrane 16 while filtering the treatment water 34 with the filter membrane 16. When the rate of filtered water is reduced, pressure is applied to the filter membrane 16 to peel the sedimentary layer 32 off the filter membrane and to deposit it at a lower part of the treatment tank 14. 【課題】シリコン屑等の被除去物を含む被処理水を処理する際のフラックスが大きく、且つ、高いレベルで被処理水を脱水することを可能とする濾過装置を提供する。【解決手段】本発明の濾過装置１０では、処理タンク１４に貯留された被処理水３４に、セラミック等の硬質材料から成る濾過膜１６を浸漬している。また、この濾過膜１６の内部空間にポンプ２４で所定の吸引圧を加えることで、濾過膜１６で被処理水３４を濾過しつつ、濾過膜１６の濾過面１６Ａに被除去物から成る堆積層３２を積層している。更に、濾過水の流量が低減したら、濾過膜１６に加圧を加えて、堆積層３２を濾過膜から離脱させて処理タンク１４の下方に沈殿させている。【選択図】図１