DECOMPRESSION DRYING DEVICE AND DECOMPRESSION DRYING METHOD USING THE SAME

• Main Author: KAWANAMI YUKO
• Format: Patent
• Language: English; Japanese
• Published: 08.12.2014
• Subjects: BLASTING; DRYING; DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM; HEATING; LIGHTING; MECHANICAL ENGINEERING; WEAPONS

PROBLEM TO BE SOLVED: To provide a decompression drying device capable of preventing impurity from adhering to a coating film during decompression drying compared with a conventional one, and a decompression drying method using the same.SOLUTION: A drying object W is placed in a chamber 3, the drying object W is covered, and a box body 4 is arranged so as to bring a peripheral end surface 40 into tight contact with an inner bottom surface 30. At the driving time of a pump 6, internal space 21 surrounding an inner surface of the box body 4 and internal space 20 of the chamber 3 surrounding an outside surface of the box body 4 are alternately switched between a blocked state and a communicating state. During the communicating state, an internal pressure in the internal space 21 is decompressed following the internal pressure in the internal space 20, and the drying object W is dried. 【課題】従来に比べて減圧乾燥時の塗布膜への不純物の付着を防止することが可能な減圧乾燥装置と、これを用いた減圧乾燥方法を提供する。【解決手段】チャンバ３の中に乾燥対象物Ｗを載置し、乾燥対象物Ｗを覆い、周端面４０を内底面３０に密着させるように箱体４を配置する。ポンプ６の駆動時において、箱体４の内表面を取り囲む内部空間２１と、箱体４の外表面を取り囲むチャンバ３の内部空間２０との間を遮断状態と連通状態とに交互に切り替わり、連通状態の際に内部空間２１の内圧を内部空間２０の内圧に追従して減圧し、乾燥対象物Ｗを乾燥する。【選択図】図５