OPTICAL FILTER
PROBLEM TO BE SOLVED: To narrow a transmission band of an optical filter using surface plasmon resonance.SOLUTION: The optical filter comprises, as shown in Fig.1, a substrate 10 made of SiO, a high refractive index layer 11 located on the substrate 10, a gap layer 12 located on the high refractive...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English Japanese |
Published |
20.11.2014
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To narrow a transmission band of an optical filter using surface plasmon resonance.SOLUTION: The optical filter comprises, as shown in Fig.1, a substrate 10 made of SiO, a high refractive index layer 11 located on the substrate 10, a gap layer 12 located on the high refractive index layer 11, a metal layer 13 located on the gap layer 12, and a protective layer 14 located on the metal layer 13. The high refractive index layer 11 is made of TiOthat is a dielectric material having a higher refractive index than that of the substrate 10. The gap layer 12 is made of SiO, same as the substrate 10 and has a refractive index lower than that of the high refractive index layer 11. The metal layer 13 has a periodical structure of a pattern where square metal dots 15 made of Al are arranged into a square lattice in a plan view.
【課題】表面プラズモン共鳴を利用した光学フィルタについて、透過帯域を狭くすること。【解決手段】光学フィルタは、図1のように、SiO2からなる基板10と、基板10上に位置する高屈折率層11と、高屈折率層11上に位置するギャップ層12と、ギャップ層12上に位置する金属層13と、金属層13上に位置する保護層14と、によって構成されている。高屈折率層11は、基板10よりも屈折率の高い誘電体であるTiO2からなる。ギャップ層12は、基板10と同様にSiO2からなり、高屈折率層11よりも屈折率が低くなっている。金属層13は、平面視において、Alからなる正方形の金属ドット15が正方格子状に配列されたパターンの周期的構造を有している。【選択図】図1 |
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Bibliography: | Application Number: JP20130098442 |