SILICA-BASED POROUS FILM, ARTICLE HAVING SILICA-BASED POROUS FILM, AND METHOD FOR PRODUCING THE SAME ARTICLE
PROBLEM TO BE SOLVED: To provide a silica-based porous film that has good antireflection performance and antifouling property and is produced in a simple production process, to provide an article having the silica-based porous film and to provide a method for producing the article.SOLUTION: The sili...
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Main Authors | , , , , , |
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Format | Patent |
Language | English Japanese |
Published |
17.11.2014
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Subjects | |
Online Access | Get full text |
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