COATING DEVICE OF COATING FILM MATERIAL, METHOD OF FORMING COATING FILM ON LONG MEMBER

PROBLEM TO BE SOLVED: To provide a thin film forming device or the like which suppresses fracture of a long member, and can increase speed of the long member as compared with a conventional device.SOLUTION: A dice 5a and a dice 5b are separately arranged on a straight line through a cylindrical part...

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Bibliographic Details
Main Authors IMAI TAKAHIKO, TOFUJI SHINPEI, SHIBAYAMA SATOHISA, ORITA NOBUAKI, ITO HISAHIRO
Format Patent
LanguageEnglish
Japanese
Published 13.11.2014
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Summary:PROBLEM TO BE SOLVED: To provide a thin film forming device or the like which suppresses fracture of a long member, and can increase speed of the long member as compared with a conventional device.SOLUTION: A dice 5a and a dice 5b are separately arranged on a straight line through a cylindrical part 3. Each of the dices 5a, 5b is structured of a dice part 6 on an upper part and a guide part 8 on a lower part. End parts of the cylindrical part 3 are in contact with the dices 5a, 5b through seal members 15. A decompression device 7 is connected to the cylindrical part 3. Therefore, an inside of the cylindrical part 3 is decompressed by the decompression device 7. In this case, the seal members 15 are arranged between the cylindrical part 3 and the dices 5a, 5b. Thus, leakage of air or the like from clearances between the cylindrical part 3 and the dices 5a, 5b can be prevented. The cylindrical part 3 is, for example, a silica tube. 【課題】 長尺部材の破断を抑制するとともに、従来と比較して長尺部材の速度を上げることが可能な薄膜の形成装置等を提供する。【解決手段】 ダイス5aとダイス5bが筒状部3を介して離間して一直線上に配置される。ダイス5a、5bは、それぞれ、上部のダイス部6と、下部のガイド部8とから構成される。筒状部3の端部は、ダイス5a、5bとシール部材15を介して接触する。筒状部3には、減圧装置7が接続される。したがって、減圧装置7によって、筒状部3内部は減圧される。この際、筒状部3とダイス5a、5bの間にはシール部材15が設けられるため、筒状部3とダイス5a、5bとの隙間から、エア等がリークすることを防止することができる。なお、筒状部3は、例えば石英管である。【選択図】図1
Bibliography:Application Number: JP20130086345