COATING DEVICE OF COATING FILM MATERIAL, METHOD OF FORMING COATING FILM ON LONG MEMBER

• Main Authors: IMAI TAKAHIKO, TOFUJI SHINPEI, SHIBAYAMA SATOHISA, ORITA NOBUAKI, ITO HISAHIRO
• Format: Patent
• Language: English; Japanese
• Published: 13.11.2014
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; PERFORMING OPERATIONS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a thin film forming device or the like which suppresses fracture of a long member, and can increase speed of the long member as compared with a conventional device.SOLUTION: A dice 5a and a dice 5b are separately arranged on a straight line through a cylindrical part 3. Each of the dices 5a, 5b is structured of a dice part 6 on an upper part and a guide part 8 on a lower part. End parts of the cylindrical part 3 are in contact with the dices 5a, 5b through seal members 15. A decompression device 7 is connected to the cylindrical part 3. Therefore, an inside of the cylindrical part 3 is decompressed by the decompression device 7. In this case, the seal members 15 are arranged between the cylindrical part 3 and the dices 5a, 5b. Thus, leakage of air or the like from clearances between the cylindrical part 3 and the dices 5a, 5b can be prevented. The cylindrical part 3 is, for example, a silica tube. 【課題】 長尺部材の破断を抑制するとともに、従来と比較して長尺部材の速度を上げることが可能な薄膜の形成装置等を提供する。【解決手段】 ダイス５ａとダイス５ｂが筒状部３を介して離間して一直線上に配置される。ダイス５ａ、５ｂは、それぞれ、上部のダイス部６と、下部のガイド部８とから構成される。筒状部３の端部は、ダイス５ａ、５ｂとシール部材１５を介して接触する。筒状部３には、減圧装置７が接続される。したがって、減圧装置７によって、筒状部３内部は減圧される。この際、筒状部３とダイス５ａ、５ｂの間にはシール部材１５が設けられるため、筒状部３とダイス５ａ、５ｂとの隙間から、エア等がリークすることを防止することができる。なお、筒状部３は、例えば石英管である。【選択図】図１