ELECTROSTATIC CHUCK

• Main Authors: YOSHII YUICHI, ANADA KAZUTERU
• Format: Patent
• Language: English; Japanese
• Published: 06.11.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide an electrostatic chuck which can obtain high dielectric strength voltage against discharge in a gas introduction path or which can perform temperature control on an adsorption object with high uniformity in wafer temperature.SOLUTION: An electrostatic chuck comprises...