HIGH-FREQUENCY POWER SUPPLY DEVICE

• Main Authors: MORII TATSUYA, FUKUMOTO YOSHIKI
• Format: Patent
• Language: English; Japanese
• Published: 30.10.2014
• Subjects: AMPLIFIERS; BASIC ELECTRONIC CIRCUITRY; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS

PROBLEM TO BE SOLVED: To solve such a problem that in conventional reflection protection control, a progressive wave power outputted from a progressive wave power output part is suppressed too much.SOLUTION: A threshold value selection part 73 reads a reflection protection threshold value, which corresponds to a reflection coefficient at the present time calculated by a reflection coefficient calculation part 71, from a reflection protection threshold value table 72 and outputs the reflection protection threshold value as an appropriate reflection protection threshold value PRth. A reflection protection control part 80 outputs an output suppression signal Pres (positive value), which corresponds to a magnitude of a difference between the appropriate reflection protection threshold value PRth and a reflection wave power detection value Pr, when the reflection wave power detection value Pr is greater than the appropriate reflection protection threshold value PRth. Using the output suppression signal Pres, reflection protection control is performed to suppress a progressive wave power outputted from a progressive wave power output part 10. Also, when the reflection wave power detection value Pr is equal to or smaller than the appropriate reflection protection threshold value PRth, steady-state control is performed. 【課題】従来の反射保護制御では、進行波電力出力部から出力させる進行波電力を抑制しすぎる。【解決手段】閾値選択部７３は、反射係数演算部７１によって演算された現時点の反射係数 に対応する反射保護閾値を反射保護閾値テーブル７２から読み出して、適正反射保護閾値ＰＲｔｈとして出力する。反射保護制御部８０では、反射波電力検出値Ｐｒが適正反射保護閾値ＰＲｔｈよりも大きくなった場合に、適正反射保護閾値ＰＲｔｈと反射波電力検出値Ｐｒとの差分の大きさに応じた出力抑制信号Ｐｒｅｓ（正の値）を出力する。これにより反射保護制御が行われ、進行波電力出力部１０から出力する進行波電力が抑制される。また、反射波電力検出値Ｐｒが適正反射保護閾値ＰＲｔｈ以下の場合には、定常時制御が行われる。【選択図】 図２