WORK TRANSFER DEVICE

• Main Authors: KISHIMOTO YOSHITAKA, TAKEUCHI YOSHIYUKI
• Format: Patent
• Language: English; Japanese
• Published: 27.10.2014
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a work transfer device of simple configuration which can transfer a work, e.g., a semiconductor substrate, efficiently between a first predetermined position and a second predetermined position, in the manufacturing process of a semiconductor.SOLUTION: A work transfer device for transferring a work 23 from the first predetermined position to the second predetermined position includes: first transfer means 11 including a Bernoulli hand 11a having a holding surface for holding the work, and suction holding the work located below the holding surface by a predetermined distance, and a first movement mechanism 11b for moving the Bernoulli hand; second transfer means 12 having a work support hand 12a having a support surface for supporting the work, and a second movement mechanism 12b for moving the work support hand; and position control means 42 for controlling the first movement mechanism and second movement mechanism so that the holding surface of the Bernoulli hand is located above the support surface of the work support hand by the total distance of the predetermined distance and the thickness of the work. 【課題】半導体の製造工程等において、第１所定位置と第２所定位置の間で半導体基板等のワークを効率よく搬送することができ、構成が簡素なワーク搬送装置を提供する。【解決手段】第１所定位置から第２所定位置にワーク２３を搬送するワーク搬送装置において、ワークを保持する保持面を有し、該保持面から所定距離下方に位置するワークを吸引保持するベルヌーイハンド１１aと、該ベルヌーイハンドを移動させる第１移動機構１１bを備えた第１搬送手段１１と、ワークを支持する支持面を有するワーク支持ハンド１２aと、該ワーク支持ハンドを移動させる第２移動機構１２bを有する第２搬送手段１２と、ワーク支持ハンドの支持面から、前記所定距離及びワークの厚さの合計距離上方にベルヌーイハンドの保持面が位置するように第１移動機構と第２移動機構を制御する位置制御手段４２を備える。【選択図】図１