SUBSTRATE HEATING APPARATUS AND SOLDERING APPARATUS

PROBLEM TO BE SOLVED: To provide a pre-heat apparatus capable of suppressing consumption power and surely raising the temperature of a substrate.SOLUTION: A pre-heat apparatus 1A has a heater 2 for heating a substrate 11. The pre-heat apparatus 1A raises the output of the heater 2 in tandem with a l...

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Bibliographic Details
Main Authors OSHIMIZU KAZUNORI, HASHIMOTO NOBORU, MUKAI NAOTO
Format Patent
LanguageEnglish
Japanese
Published 16.10.2014
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Summary:PROBLEM TO BE SOLVED: To provide a pre-heat apparatus capable of suppressing consumption power and surely raising the temperature of a substrate.SOLUTION: A pre-heat apparatus 1A has a heater 2 for heating a substrate 11. The pre-heat apparatus 1A raises the output of the heater 2 in tandem with a loading operation of the substrate 11 and performs the pre-heat for the substrate 11. The pre-heat apparatus 1A also has a temperature sensor 3 for measuring the temperature of the loaded substrate 11, sets the output of the heater 2 on the basis of the temperature of the substrate 11 and performs the pre-heat for the substrate 11. The pre-heat apparatus 1A lowers the output of the heater 2 in tandem with completion of the pre-heat. 【課題】消費電力を抑えることができ、かつ、基板の温度を確実に上昇させることができるプリヒート装置を提供する。【解決手段】プリヒート装置1Aは、基板11を加熱するヒータ2を備える。プリヒート装置1Aは、基板11の投入動作に連動してヒータ2の出力を上昇させて、基板11のプリヒートを行う。また、プリヒート装置1Aは、投入された基板11の温度を測定する温度センサ3を備え、基板11の温度に基づきヒータ2の出力を設定して、基板11のプリヒートを行う。更に、プリヒート装置1Aは、プリヒートの完了に連動してヒータ2の出力を低下させる。【選択図】図1
Bibliography:Application Number: JP20130072981