EXPOSURE DEVICE

• Main Authors: ITO RYOSUKE, FURUYA YOSHIO
• Format: Patent
• Language: English; Japanese
• Published: 16.10.2014
• Subjects: ACCESSORIES THEREFOR; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES; APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM; APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide an exposure light that simultaneously observes two images by observation light and drawing light without splitting optical path.SOLUTION: An exposure device comprises an optical unit that draws a pattern on a substrate W by emitting exposure light; and an observation pickup part 50 that emits observation light to the substrate W, thereby picking up an image acquired by the exposure light and observation light. An objective lens 450 images the exposure light onto the surface of the substrate W and condenses the observation light. The imaging lens 55 is a color aberration correction lens that compensates for a color aberration caused by the objective lens 450, and forms, onto an imager 56, the image acquired by the exposure light and observation light. 【課題】光路を分割することなく、観察光および描画光による２つの像を同時に観察する露光装置を提供する。【解決手段】描画装置は、露光光を照射して基板Ｗにパターンを描画する光学ユニットと、基板Ｗに観察光を照射して露光光および観察光による像をともに撮像する観察撮像部５０とを備える。対物レンズ４５０は、基板Ｗ表面に露光光を結像させ、観察光を集光する。結像レンズ５５は、対物レンズ４５０により生じる色収差を補償する色収差補正型のレンズであり、露光光および観察光による像を撮像素子５６に共に結像させる。【選択図】図４