FILM FORMING APPARATUS

• Main Authors: FUKUDA HIROYUKI, IIO ITSUSHI
• Format: Patent
• Language: English
• Published: 02.10.2014
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a film forming apparatus which can prevent a pressing force by a valve body from becoming uneven.SOLUTION: A film forming apparatus 100 includes: a cross tube 32 which extends in the longitudinal direction D1 of a valve body 9 and is connected to the valve body 9; a torsion bar 31 which partially enters the inside of the cross tube 32; and a rotary drive part 4 which gives a rotational driving force to the torsion bar 31. The torsion bar 31 is fastened to the cross tube 32 by a fastening part 34 at a middle position in the longitudinal direction D1 of the valve body 9. Consequently, the rotational driving force given to the torsion bar 31 by the rotary drive part 4 is transmitted to the cross tube 32 at the middle position in the longitudinal direction D1 of the valve body 9 through the torsion bar 31. As a result, the rotational driving force is transmitted to both sides in the longitudinal direction D1 in good balance through the cross tube 32 extending along the longitudinal direction D1 of the valve body 9.