CLEANING DEVICE OF OPTICAL MIRROR

PROBLEM TO BE SOLVED: To obtain a dry ice snow cleaning device which reduces the risk that a peeled contamination is reflected by, for example, a shield located near a cleaned surface and the cleaned surface is contaminated again when an optical mirror is cleaned by using a dry ice snow cleaning met...

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Bibliographic Details
Main Authors ANADA TAKAYASU, UENO SHINICHI
Format Patent
LanguageEnglish
Published 22.09.2014
Subjects
ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
CLEANING
CLEANING IN GENERAL
GRINDING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
POLISHING
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To obtain a dry ice snow cleaning device which reduces the risk that a peeled contamination is reflected by, for example, a shield located near a cleaned surface and the cleaned surface is contaminated again when an optical mirror is cleaned by using a dry ice snow cleaning method.SOLUTION: A jet nozzle part 13 which blows dry ice snow 16 and a cleaner head 14 which suctions the dry ice snow 16 are located close to each other. A peeled contamination 17 is immediately suctioned with the dry ice snow 16 by the cleaner head 14.
Bibliography:Application Number: JP20130048707