HIGH FREQUENCY POWER SUPPLY DEVICE

• Main Authors: MORII TATSUYA, FUKUMOTO YOSHIKI
• Format: Patent
• Language: English
• Published: 11.09.2014
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To solve such a problem of conventional reflection protective control that the traveling wave power, outputted from a traveling wave power output section is suppressed too much, and response of the whole control system is slow because a double feedback control loop is required.SOLUTION: A maximum power level setting section 53 reads a possible output power level, corresponding to a current reflection coefficient calculated by a reflection coefficient calculation section 51, from a possible output power level table 52 and outputs as a current possible output power level Pmax. A second output setting section 70 compares a traveling wave power detection value Pf with the current possible output power level Pmax, and determines a first output set value as a second output set value if the traveling wave power detection value Pf is smaller, otherwise outputs the current possible output power level Pmax as a second output setting value PFset. An output control section 80 controls a traveling wave power output section 10 so that the traveling wave power detection value Pf is equal to the second output setting value PFset.