CHARGED PARTICLE BEAM DEVICE

• Main Authors: TAKAHASHI NORIJI, FUKUDA MUNEYUKI, SUZUKI NAOMASA, SHOJO TOMOYASU
• Format: Patent
• Language: English
• Published: 04.09.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide an objective lens capable of capturing a high-resolution and high-contrast image.SOLUTION: A lower pole piece of an electromagnetically superimposed objective lens 123 is divided into an upper magnetic path and a lower magnetic path, and a potential substantially equal to a retarding potential is applied to the lower magnetic path. Namely, a magnetic path of the objective lens is formed from a yoke member 132, a cylindrical or conical booster magnetic path member 116 surrounding an electron beams, and a control magnetic path member 133 provided between the yoke member and a specimen 114, and potentials are applied from a booster power source 135 and a control magnetic path power source 136 to the booster magnetic path member and the control magnetic path member, respectively. A retarding potential is applied to the specimen from a stage power source 141. By applying a potential substantially equal to that of the specimen to the control magnetic path member, discharging of the specimen and the control magnetic path member is prevented, thereby making narrow a gap between the control magnetic path member and the specimen. Namely, a working distance may be reduced, such that high-resolution microscope observation can be performed.