METHOD FOR MANUFACTURING MASK BLANK SUBSTRATE, METHOD FOR MANUFACTURING SUBSTRATE WITH MULTILAYER REFLECTION FILM, METHOD FOR MANUFACTURING MASK BLANK, AND METHOD FOR MANUFACTURING TRANSFER MASK

• Main Authors: SHOKI TSUTOMU, YAMADA TAKAYUKI, ORIHARA TOSHIHIKO, NISHIMURA TAKAHITO
• Format: Patent
• Language: English
• Published: 21.08.2014
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GLASS; HOLOGRAPHY; JOINING GLASS TO GLASS OR OTHER MATERIALS; MATERIALS THEREFOR; METALLURGY; MINERAL OR SLAG WOOL; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS

PROBLEM TO BE SOLVED: To provide a method for manufacturing a practical mask blank substrate capable of reducing defects of a 30-nm class.SOLUTION: A mask blank substrate is manufactured by a method comprising the steps of: preparing a mask blank substrate with a polished principal surface and surface information including surface form information and position information with respect to the principal surface; detecting a specific portion on the principal surface exceeding a prescribed reference value from the surface form information and identifying the location of the detected specific portion from the position information(specific portion identifying step); and arranging a moving body having a catalyst surface arranged facing the principal surface of the mask blank substrate in the location of the specific portion identified by the specific portion identifying step and locally processing the specific portion by catalyst-referred etching in a state in which a process liquid is interposed between the catalyst surface and the specific portion (local processing step).