DEVICE AND METHOD FOR MANUFACTURING ORGANIC EL DEVICE

• Main Authors: SASAKI JUNYA, KITANI YUKA, IZAKI MAKOTO
• Format: Patent
• Language: English
• Published: 21.08.2014
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a device or a method for manufacturing an organic EL device in which film formation is possible in a stable rate and with uniform film thickness even by using a material which is liable to be fluctuated in rate due to abrupt boiling and which has high productivity and quality.SOLUTION: In a film formation using a material which is liable to induce rate fluctuation in a device for manufacturing an organic EL device, abrupt boiling is suppressed by using a crucible which has a porous material loaded inside thereof, or a crucible in which a part or the whole thereof or a part or the whole of the upper lid is constituted of a porous material and supplying fine bubbles to a film forming material filled in the crucible, and rate fluctuation is avoided.