ENERGY DISPERSIVE FLUORESCENT X-RAY ANALYZER

• Main Authors: ARAKAWA SATOSHI, KUMAZAWA KATSUMI
• Format: Patent
• Language: English
• Published: 14.08.2014
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide an energy dispersive fluorescent X-ray analyzer capable of accurately determining the quantity of an element to be measured even if the temperature is changed.SOLUTION: An energy dispersive fluorescent X-ray analyzer comprises: an X-ray source 1 emitting excitation X-rays A including characteristic X-rays of an energy E1 generated from a target; a filter 7 composed of an element, identical to an element composing a target, or an element whose atomic number is greater by one than that of the element composing the target; a detector 4 for detecting, simultaneously with the excitation X-rays A, fluorescent X-rays B generated from a sample; a pulse height analyzer 5; and an operation unit 6. The operation unit 6 assumes that a peak based on the characteristic X-rays of the energy E1 is created by that a low wave height side half is made by reversing a high wave height side half at a peak apex of a peak value H1 as a turning axis, and obtains a count value of a peak on the basis of characteristic X-rays of an energy Ex of an element to be measured in the sample.