CERAMIC SINTERED BODY, FLOW-CHANNEL MEMBER USING THE SAME, AND SEMICONDUCTOR INSPECTION DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS

PROBLEM TO BE SOLVED: To provide a ceramic sintered body which suppresses formation of cracks, and to provide a flow-channel member using the same, and a semiconductor inspection device and a semiconductor manufacturing apparatus.SOLUTION: Because of having a first meshed hole therein of which at le...

Full description

Saved in:
Bibliographic Details
Main Authors SEKIGUCHI KEIICHI, FUJIO KAZUHIKO, ISHIMINE YUSAKU
Format Patent
LanguageEnglish
Published 10.07.2014
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To provide a ceramic sintered body which suppresses formation of cracks, and to provide a flow-channel member using the same, and a semiconductor inspection device and a semiconductor manufacturing apparatus.SOLUTION: Because of having a first meshed hole therein of which at least a part is connected to the outside, ceramic sintered bodies 10, 20 and 30 suppress formation of cracks and the like. When the ceramic sintered bodies 10, 20 and 30 are used as a flow-channel member 40, a liquid is not leaked therefrom and the flow-channel member 40 has high reliability. When the flow-channel member 40 is used in a semiconductor inspection device 50 and a semiconductor manufacturing apparatus 60, the device and the apparatus have high reliability.
Bibliography:Application Number: JP20130240013