DIFFRACTION GRATING AND ANALYZER
PROBLEM TO BE SOLVED: To provide a diffraction grating whose wavelength dispersion characteristic is stable for changes in temperature and an analyzer having the same.SOLUTION: A diffraction grating includes a substrate and a light reflection film. A plurality of saw-tooth shape grooves are provided...
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Format | Patent |
Language | English |
Published |
07.07.2014
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Abstract | PROBLEM TO BE SOLVED: To provide a diffraction grating whose wavelength dispersion characteristic is stable for changes in temperature and an analyzer having the same.SOLUTION: A diffraction grating includes a substrate and a light reflection film. A plurality of saw-tooth shape grooves are provided with the light reflection film. Between the substrate and light reflection film, resin is provided. In the diffraction grating, a supporting film composed of a hard member is provided between the light reflection film and resin. In the resin, low thermal expansion particulates having a small thermal expansion coefficient are filled. |
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AbstractList | PROBLEM TO BE SOLVED: To provide a diffraction grating whose wavelength dispersion characteristic is stable for changes in temperature and an analyzer having the same.SOLUTION: A diffraction grating includes a substrate and a light reflection film. A plurality of saw-tooth shape grooves are provided with the light reflection film. Between the substrate and light reflection film, resin is provided. In the diffraction grating, a supporting film composed of a hard member is provided between the light reflection film and resin. In the resin, low thermal expansion particulates having a small thermal expansion coefficient are filled. |
Author | TANAKA TATSUYA MORIOKA TOMONARI |
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Notes | Application Number: JP20120281943 |
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RelatedCompanies | HITACHI HIGH-TECHNOLOGIES CORP |
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Snippet | PROBLEM TO BE SOLVED: To provide a diffraction grating whose wavelength dispersion characteristic is stable for changes in temperature and an analyzer having... |
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SubjectTerms | COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RADIATION PYROMETRY TESTING |
Title | DIFFRACTION GRATING AND ANALYZER |
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