DIFFRACTION GRATING AND ANALYZER

PROBLEM TO BE SOLVED: To provide a diffraction grating whose wavelength dispersion characteristic is stable for changes in temperature and an analyzer having the same.SOLUTION: A diffraction grating includes a substrate and a light reflection film. A plurality of saw-tooth shape grooves are provided...

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Bibliographic Details
Main Authors MORIOKA TOMONARI, TANAKA TATSUYA
Format Patent
LanguageEnglish
Published 07.07.2014
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Summary:PROBLEM TO BE SOLVED: To provide a diffraction grating whose wavelength dispersion characteristic is stable for changes in temperature and an analyzer having the same.SOLUTION: A diffraction grating includes a substrate and a light reflection film. A plurality of saw-tooth shape grooves are provided with the light reflection film. Between the substrate and light reflection film, resin is provided. In the diffraction grating, a supporting film composed of a hard member is provided between the light reflection film and resin. In the resin, low thermal expansion particulates having a small thermal expansion coefficient are filled.
Bibliography:Application Number: JP20120281943