DIFFRACTION GRATING AND ANALYZER
PROBLEM TO BE SOLVED: To provide a diffraction grating whose wavelength dispersion characteristic is stable for changes in temperature and an analyzer having the same.SOLUTION: A diffraction grating includes a substrate and a light reflection film. A plurality of saw-tooth shape grooves are provided...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
07.07.2014
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a diffraction grating whose wavelength dispersion characteristic is stable for changes in temperature and an analyzer having the same.SOLUTION: A diffraction grating includes a substrate and a light reflection film. A plurality of saw-tooth shape grooves are provided with the light reflection film. Between the substrate and light reflection film, resin is provided. In the diffraction grating, a supporting film composed of a hard member is provided between the light reflection film and resin. In the resin, low thermal expansion particulates having a small thermal expansion coefficient are filled. |
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Bibliography: | Application Number: JP20120281943 |