PROCESS OF MANUFACTURING PIEZO ELECTRIC ELEMENT

PROBLEM TO BE SOLVED: To prevent unnecessary etching during groove etching while using a photoresist film used for patterning a corrosion film for forming a groove also for forming an electrode by lift-off.SOLUTION: The process of manufacturing a piezo-electric element includes: forming an already e...

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Bibliographic Details
Main Authors MORISHIMA SHINICHI, EMOTO HIROSHI, KIZAKI SHIGERU
Format Patent
LanguageEnglish
Published 09.06.2014
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:PROBLEM TO BE SOLVED: To prevent unnecessary etching during groove etching while using a photoresist film used for patterning a corrosion film for forming a groove also for forming an electrode by lift-off.SOLUTION: The process of manufacturing a piezo-electric element includes: forming an already exposed part 55 by exposing part of a photoresist film 54 on which a pattern for an outer shape is formed; forming a pattern of an anticorrosion film 51 for a groove (Fig. 7[K]); and then developing the already exposed part 55 to form a pad electrode in an area 49 (Fig. 7[L]) protected by the already exposed part 55 during etching of a groove 13a.
Bibliography:Application Number: JP20120259480