OPTICAL SCANNER AND MANUFACTURING METHOD

• Main Authors: OYAMA KOICHI, NISHIKAWA HIDEAKI, TSUGE AKIO, WADO HIROYUKI
• Format: Patent
• Language: English
• Published: 19.05.2014
• Subjects: ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PICTORIAL COMMUNICATION, e.g. TELEVISION; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

PROBLEM TO BE SOLVED: To enlarge displacement of a piezoelectric actuator without making it thin.SOLUTION: An optical scanner includes: a mirror having a reflection surface for reflecting a light beam; an elastic connection part which becomes a rotational axis k for torsionally vibrating the mirror; and a piezoelectric unimorph 4x for generating a drive force for torsionally vibrating the mirror with the rotational axis k as a center. Also, the piezoelectric unimorph 4x is configured by laminating a drive layer 23 formed by sandwiching a piezoelectric film layer 31 between an upper electrode layer 32 and a lower electrode layer 33, and a support layer 21 for supporting the drive layer 23 along the direction vertical to the rotational axis k. Furthermore, the piezoelectric unimorph 4x, where one end is fixed as a fixed end, is configured in such a manner that it bends as voltage is applied between the upper electrode layer 32 and the lower electrode layer 33, and the other end displaces as a free end. At the support layer 21, recess parts 41, 42, 43 and 44 are formed whose depth is the same as the thickness of the support layer 21.