IMAGING DEVICE, CONTROLLER AND CONTROL METHOD
PROBLEM TO BE SOLVED: To enable weighting on a scan line about an important part to be an inspection target of an object to be inspected.SOLUTION: An imaging device controls scanning means so as to overlap portions of adjacent scanning areas on each other among a plurality of scanning areas of measu...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
08.05.2014
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Subjects | |
Online Access | Get full text |
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