IMAGING DEVICE, CONTROLLER AND CONTROL METHOD

PROBLEM TO BE SOLVED: To enable weighting on a scan line about an important part to be an inspection target of an object to be inspected.SOLUTION: An imaging device controls scanning means so as to overlap portions of adjacent scanning areas on each other among a plurality of scanning areas of measu...

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Bibliographic Details
Main Authors NOZATO KOJI, KOBAYASHI SHUICHI, HIROSE FUTOSHI, SUGITA MITSUO, KATAYAMA AKIHIRO
Format Patent
LanguageEnglish
Published 08.05.2014
Subjects
DIAGNOSIS
HUMAN NECESSITIES
HYGIENE
IDENTIFICATION
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
MEDICAL OR VETERINARY SCIENCE
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SURGERY
TESTING
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Summary:PROBLEM TO BE SOLVED: To enable weighting on a scan line about an important part to be an inspection target of an object to be inspected.SOLUTION: An imaging device controls scanning means so as to overlap portions of adjacent scanning areas on each other among a plurality of scanning areas of measuring beams in an object to be inspected at a prescribed part, and acquires a tomographic image of the object to be inspected on the basis of a plurality of beams obtained by multiplexing a plurality of return beams from the object to be inspected irradiated with the plurality of measuring beams with a plurality of reference beams corresponding to the plurality of measuring beams.
Bibliography:Application Number: JP20140025836