ELECTROSTATIC CHUCK

• Main Authors: WADA TAKUMA, ANADA KAZUTERU
• Format: Patent
• Language: English
• Published: 24.04.2014
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; TRANSPORTING

PROBLEM TO BE SOLVED: To provide an electrostatic chuck that can maintain a processed object to be suction held at a desired temperature.SOLUTION: An electrostatic chuck includes a ceramic dielectric substrate of polycrystalline ceramic sintered compact having a first principal surface on which a processed object is mounted, and a second principal surface on the reverse side of the first principal surface, an electrode layer interposed between the first and second principal surfaces of the ceramic dielectric substrate and sintered integrally therewith, a temperature control plate provided on the second principal surface side, and a heater provided between the electrode layer and the temperature control plate. The ceramic dielectric substrate has a first dielectric layer between the electrode layer and the first principal surface, and a second dielectric layer between the electrode layer and the second principal surface. The first and second dielectric layers of the ceramic dielectric substrate has an infrared spectral transmittance of 20% or more, in terms of thickness of 1 mm.