METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR

• Main Author: NAKAO KAZUTAKA
• Format: Patent
• Language: English
• Published: 21.04.2014
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric actuator capable of improving positional accuracy of an internal electrode and a recess without increasing warpage and deformation of a piezoelectric element.SOLUTION: A method of manufacturing a piezoelectric actuator 1 including a piezoelectric element 2 which ultrasonically vibrates and a friction member 4 which is fixed at a recess 3 formed on one surface 2a of a piezoelectric element 2 and transmits ultrasonic vibrations comprises the steps of: forming a ceramic green sheet in which a plurality of pre-burning piezoelectric element regions 15 serving as a rectangular piezoelectric element after burning are arranged in a lattice shape and forming a conductor layer serving as an internal electrode 10 after burning in the pre-burning piezoelectric element region 15; forming a ceramic green sheet laminate 16 by laminating a plurality of ceramic green sheets; and forming a recess 3 in a direction equivalent to a width direction of the pre-burning piezoelectric element region 15 by grinding an outer surface of the ceramic green sheet laminate 16.